Semiconductor package and packaging process for side-wall plating with a conductive film

ABSTRACT

Techniques and devices are disclosed for forming wettable flanks on no-leads semiconductor packages. A lead frame assembly may include a plurality of leads, each lead including a die surface and a plating surface, and an integrated circuit die arranged on the die surface. The plating surface for each of the leads may be plated with an electrical plating. A connecting film may be applied and lead frame assembly may be singulated into individual semiconductor packages by a series of cuts through each of the plurality of leads and the electrical plating of each of the plurality of leads to a depth up to or through a portion of the connecting film to create a channel exposing lead sidewalls of each of the plurality of leads. The lead sidewalls of each of the plurality of leads may be plated with a second electrical plating and the connecting film may be removed.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.17/059,074, filed on Nov. 25, 2020, which is a 371 U.S. National Phaseof International Application No. PCT/US2020/017131, filed on Feb. 7,2020, which claims priority to Chinese Patent Application No.201911347346.8, filed Dec. 24, 2019, which are incorporated by referenceas if fully set forth.

BACKGROUND

Flat “no-leads’ or “leadless” semiconductor die packages electricallyand physically couple integrated circuit dies (or “dice”) to printedcircuit boards (“PCB”) with flat leads and without through holesextending through a printed circuit board (PCB). Although thesesemiconductor die packages are referred to as “no-leads” or “leadless”packages, the term “leads” in the present disclosure is used to refer tothe flat contact pads present on flat no-leads packages. Thesesemiconductor die packages have no “leads” in the sense that there areno leads that extend past or beyond the outer periphery of the package.Flat no-leads packages may be classified as quad flat no-leads (“QFN”)packages, having leads on all four sides of the package, and dual flatno-leads (“DFN”) packages, having leads on two opposing sides. Withinthese semiconductor die packages, one or more integrated circuit dies isencapsulated within a non-conductive molding material. An electricallyconductive lead frame, typically made of a metal like copper, iselectrically coupled to internal components of the semiconductor diepackage and exposes leads externally that can be electrically coupled toa PCB. Improvements to flat no-leads packages are constantly being made.

Leadless semiconductor die packages have several advantages overpackages having leads extending beyond a perimeter of the package. Suchsemiconductor die packages may have a low profile as compared to othertypes of semiconductor die packages. Such semiconductor die packages maytake up less space and thereby have a smaller “footprint” on a printedcircuit board than conventional packages having leads extending beyondthe perimeter of the semiconductor die packages. Such leadlesssemiconductor die packages may also have better thermal performance ascompared to packages having leads extending beyond the perimeter of thepackage.

An issue within the relevant industry as it concerns QFN and DFNpackages relates to the inspection of the solder connections to theleads of the packages. In order to ensure proper solder connections toQFN and DFN packages, it is necessary to inspect the connections. Theseinspections can be performed by x-ray, for example, or by automatedoptical inspection (AOI). Automated optical inspection (AOI) systems areused to inspect, for example, semiconductor devices and printed circuitboards (PCBs), for defects. QFN and DFN packages can allow for AOI,which is less costly than x-ray inspections, if the leads are orientedin such a manner that the portions of the sides or “flanks” of the leadsare wettable by solder, such as by having solder wick up the sides orsidewalls of the exposed leads.

Conventional lead wettable devices may be formed by a step cuttingprocess which requires multiple surfaces to be plated at the same timewith the same palatable material. Plating multiple surfaces at the sametime may be complicated and may not allow targeted plating for specificsurfaces.

There is therefore the need for an efficient method of manufacturing asemiconductor die packages having wettable flanks.

SUMMARY

In an aspect of the present invention, a method for fabricating asemiconductor die package from a package assembly includes a lead frameincluding at least a first lead and a second lead, the first and secondleads each having a top surface and a bottom surface, a first integratedcircuit die provided on the top surface of the first lead, a secondintegrated circuit die provided on the top surface of the second lead,and a mold encapsulation surrounding at least portions of the lead frameand at least portions of the first integrated circuit die and the secondintegrated circuit die, the mold encapsulation having a top majorsurface and a bottom major surface. The bottom surface of the first andsecond leads may be plated with a first electrical plating. A connectingfilm may be applied to the top surface of the mold encapsulation. A cutmay be made through the first electrical plating on the bottom surfaceof the second lead through the top major surface of the moldencapsulation to create a channel, the channel exposing a first leadsidewall and a second lead sidewall of the second lead. A conductivefilm may be applied to connect the bottom surface of the first lead andthe bottom surface of the second lead. The connecting film may beremoved. The first lead sidewall and the second lead sidewall may beplated, through the channel, with a second electrical plating and theconductive film may be removed.

In an aspect of the present invention, a method for fabricating asemiconductor die package from a package assembly includes a lead frameincluding at least a first lead and a second lead, the first and secondleads each having a top surface and a bottom surface, a first integratedcircuit die provided on the top surface of the first lead, a secondintegrated circuit die provided on the top surface of the second lead,and a mold encapsulation surrounding at least portions of the lead frameand at least portions of the first integrated circuit die and the secondintegrated circuit die, the mold encapsulation having a top majorsurface and a bottom major surface. A bottom surface of the first leadand a bottom surface of the second lead may be plated with a firstelectrical plating. A conductive film may be applied to connect thebottom surface of the first lead and the bottom surface of the secondlead. A cut may be made to create a channel through the moldencapsulation, the second lead, and the first electrical plating on thebottom surface of the second lead, the channel exposing a first leadsidewall and a second lead sidewall of the second lead. The first leadsidewall and the second lead sidewall may be platted, through thechannel, with a second electrical plating and the conductive film may beremoved.

In an aspect of the present invention, a method for fabricating a leadside-wall wettable semiconductor die package from a lead frame assemblyincludes a plurality of leads, each lead including a die surface and aplating surface, and an integrated circuit die arranged on the diesurface. The lead frame assembly may be partially embedded in a moldencapsulation, the mold encapsulation having opposed first and secondmajor surfaces. The plating surface of each of the plurality of leadsmay be plated with a first electrical plating. A connecting film may beapplied to the first major surface of the mold encapsulation. The leadframe assembly may be singulated into individual semiconductor diepackages. The singulating may include making a first series of parallelcuts along a first direction cutting through the second major surface ofthe mold encapsulation to a depth up to the connecting film or a portionof the connecting film and making a second series of parallel cuts alonga second direction, the second direction substantially perpendicular tothe first direction, the second series of parallel cuts cutting throughthe second major surface of the mold encapsulation, each of theplurality of leads, and the electrical plating of each of the pluralityof leads to a depth up to the connecting film or a portion of theconnecting film to create a channel exposing a first lead sidewall and asecond lead sidewall of each of the plurality of leads. The first leadsidewall and the second lead sidewall of each of the plurality of leadsmay be plated, through the channels, with a second electrical plating.The connecting film may be removed to separate the individual leadside-wall wettable semiconductor die packages.

In an aspect of the invention, a semiconductor package is made byproviding a lead frame assembly comprising a plurality of leadsadjacently positioned. Each lead comprising a first surface and a secondsurface. Portions of the lead frame assembly are encapsulated in a moldencapsulation such that the second surface of each of the plurality ofleads remain exposed, the mold encapsulation having a first majorsurface and a second major surface. The second surface of each of theplurality of leads is plated with a first electrical plating. Aconductive film is applied across the second surface of each of theplurality of leads and the second major surface of the moldencapsulation. A cut is made in a first direction through the moldencapsulation, each of the plurality of leads, and the first electricalplating on the second surface of each of the plurality of leads tocreate a channel in each of the plurality of leads, each of the channelsexposing a first lead sidewall and a second lead sidewall of each of theplurality of leads. The first lead sidewall and the second lead sidewallof each of the plurality of leads are plated through the channel with asecond electrical plating. The conductive film is removed to separatethe package assembly into individual semiconductor packages.

BRIEF DESCRIPTION OF THE DRAWINGS

A more detailed understanding can be had from the following description,given by way of example in conjunction with the accompanying drawingswherein:

FIG. 1 is a flow diagram of an illustrative method for forming wettableflanks on a semiconductor die package from a package assembly, accordingto an example;

FIG. 2A is a top view of a package assembly illustrating a lead framewith dies in a mold encapsulation, according to an example;

FIG. 2B is a cross-sectional view of the package assembly of FIG. 2A,according to an example;

FIG. 2C is a bottom view of the package assembly of FIG. 2A, accordingto an example;

FIG. 3 is a cross-sectional view of a package assembly with bottomplating, according to an example;

FIG. 4 is a cross-sectional view of the package assembly with a filmapplied on a top surface, according to an example;

FIG. 5A is a top view of package assembly illustrating the cuts andcutting pattern that create channels within the package assembly,according to an example;

FIG. 5B is a cross-sectional view of the package assembly of FIG. 5A,according to an example;

FIG. 5C is a bottom view of the package assembly of FIG. 5A, accordingto an example;

FIG. 6 is a cross-sectional view of a package assembly after cuttingwith a conductive film attached, according to an example;

FIG. 7 is a cross-sectional view of the package assembly with aconductive film and sidewall electric plating, according to an example;

FIG. 8 is a cross-sectional view of finished semiconductor die packageswith bottom and sidewall electric plating, according to an example;

FIG. 9 is a cross-sectional view of another embodiment of a packageassembly with bottom electric plating and a conductive film, accordingto an example;

FIG. 10A is a cross-sectional view of the package assembly after cuttingto create channels within the package assembly, according to an example;

FIG. 10B is a top view of the package assembly after cutting to createchannels within the package assembly, according to an example;

FIG. 11 is a cross-sectional view of the package assembly with aconductive film and sidewall electric plating;

FIG. 12A is a perspective view of a bottom side of a DFN package withbottom and sidewall plating, according to an example;

FIG. 12B is perspective view of a top side of the DFN package of FIG.12A with bottom and sidewall plating, according to an example;

FIG. 12C is a perspective view of a bottom side of a QFN package withbottom and sidewall plating, according to an example; and

FIG. 12D is a perspective view of the top side of the QFN package ofFIG. 12C with bottom and sidewall plating, according to an example.

DETAILED DESCRIPTION

Certain terminology is used in the following description for convenienceonly and is not limiting. The words “right,” “left,” “top,” and “bottom”designate directions in the drawings to which reference is made.However, it will be understood that such orientation-based terms are forreference only and that the embodiments may be implemented in differentdirections such that such terms may be applied as adjusted based on suchrespective different directions. The words “a” and “one,” as used in theclaims and in the corresponding portions of the specification, aredefined as including one or more of the referenced item unlessspecifically stated otherwise. This terminology includes the words abovespecifically mentioned, derivatives thereof, and words of similarimport. The phrase “at least one” followed by a list of two or moreitems, such as “A, B, or C,” means any individual one of A, B or C aswell as any combination thereof.

The description provided herein is to enable those skilled in the art tomake and use the described embodiments set forth. Various modifications,equivalents, variations, combinations, and alternatives, however, willremain readily apparent to those skilled in the art. Any and all suchmodifications, variations, equivalents, combinations, and alternativesare intended to fall within the spirit and scope of the presentinvention defined by claims.

Techniques are disclosed herein for forming bottom and sidewall wettableflanks on semiconductor die packages, and, preferably, DFN and/or QFNsemiconductor die packages. The techniques include a package assemblyhaving multiple non-singulated packages. The package assembly includes alead frame having dies and other internal package components (e.g., wirebonds) coupled thereto. The dies and other components form differentregions of non-singulated packages, as further disclosed herein. Thedies and other components are encapsulated within a mold encapsulation(also referred to as a “molding,” “mold,” “encapsulation,”“encapsulation material,” “mold encapsulation material”, or othersimilar term herein). The mold encapsulation may be non-conductive andmay cover all or most of the package components but may leave exposedcertain electrical contact pads (referred to herein as “leads,”including a “first lead” and a “second lead”) and, possibly, thermalcontact pads (referred to herein as “die paddles”) as well as othercomponents as disclosed herein. The mold encapsulation may include a topmajor surface that is opposite to the bottom surface of the plurality ofleads and a bottom major surface that is adjacent and substantiallyparallel to the bottom surface of the plurality of the leads. The leadframe provides a continuous electrical connection between one end of thepackage assembly and the other, and between the various exposed leadsand die paddles of the semiconductor die packages. Elements such as wirebonds or tie bars may assist with forming the electrical connection.This electrical connection may be used for current flow duringelectroplating (e.g., a first electrical plating), which may be a stepthat occurs in the process for forming bottom and sidewall wettableflanks on DFN and/or QFN packages.

FIG. 1 shows a flow diagram of a process 100 for forming a semiconductordie packages from a package assembly, according to an aspect of thepresent invention. The process 100 of FIG. 1 is discussed in conjunctionwith FIGS. 2-11 , which illustrate stages of a package assembly 200 asthe process 100 proceeds. A lead frame 25, as referenced herein, may becut from a lead frame material such as a sheet of copper. A lead frameassembly, as referenced herein, may be the lead frame 25 having aplurality of leads 23. As shown in FIGS. 2A-2C, the leads 23 may beetched into portions of the lead frame 25.

The package assembly 200 is shown with a top surface 201 and a bottomsurface 202, as indicated in FIGS. 2A-2C. At step 10 of the process 100,a plurality of die 20 are deposited on and bonded to a correspondingplurality of leads 23 of a lead frame 25 that are part of the lead frameassembly. The lead frame assembly may include multiple leads 23integrated into a single part or unit. The lead frame assembly mayinclude any metal alloy. A plurality of semiconductor die packages maybe formed in an array of die packages in the package assembly 200, whichare then cut (e.g., singulated) into individual semiconductor diepackages. Each semiconductor die package may include a second portion(e.g., 24 b as described in FIG. 5B) of a lead 23 (e.g., 23 a) that isattached to a die 20, a first portion (e.g., 25 a as described in FIG.5B) of a lead 23 (e.g., 23 b) that is electrically connected to the die20 (e.g., by wire 21 or a tie-bar (not shown)), and mold encapsulation22. A singulated semiconductor die package may be a semiconductor diepackage that is separated from one or more other semiconductor diepackages in the package assembly, as further described herein.

At step 10, one or more of the integrated circuit dies, which arereferred to herein as “dies,” for simplicity, may be deposited on theleads 23 of the lead frame 25. At step 11, other components, such aswires 21, conductive clips (elements within the semiconductor diepackage that couple the die(s) to one or more leads), or other elementsare deposited to form a plurality of semiconductor die packages.

At step 12, a portion of the lead frame 25 is taped, and a moldencapsulation 22 is deposited around the lead frame 25 and othercomponents of the semiconductor die packages. Notably, a bottom portionof the lead frame that faces away from the wire bonds formed by wires 21deposited at step 11 may be taped to prevent the mold encapsulationdeposited at step 12 to extend past the base of the lead frame 25 suchas through gaps between two or more leads 23 in the lead frame 25. Themold encapsulation 22 may provide a physical and electrical barrier forthe components of the package. The mold encapsulation 22 may be asilica-filled resin, a ceramic, a halide-free material, or otherprotective encapsulation material, or a combination thereof. The moldencapsulation 22 may be formed by molding thermosetting materials in aprocess where a plastic is softened by heat and pressure in a transferchamber, then forced at high pressure through suitable sprues, runners,and gates into a closed mold for final curing. The mold encapsulant mayalso be formed by using a liquid which may be heated to form a solid bycuring in a UV or ambient atmosphere, or by using a solid that is heatedto form a liquid and then cooled to form a solid mold. At step 13, thelead frame 25 may be de-taped, after step 12, and one or more markings(not shown) may be applied to the lead frame assembly. The markings mayinclude one or more fiducial marks which are marks detectable by amachine that allow the machine to align itself for cutting. After step13, a package assembly 200 is provided that includes multiplenon-singulated semiconductor die packages with package components (e.g.,dies, the lead frame, and the components that couple the dies to thelead frame) encapsulated within a molding material 22.

FIG. 2A shows a top view of a package assembly 200 with a top majorsurface 22 of the mold encapsulation 22 after step 13 of the process 100of FIG. 1 . As shown in FIG. 2A, a plurality of leads 23 are provided aspart of a lead frame 25. A die 20 is deposited on each of the leads 23on a die surface 27 a of the leads (e.g., top surface, as shown in FIG.2B). As shown in FIG. 2B, a given die 20 a is deposited on a given firstlead 23 a of the plurality of leads 23 and may be electrically connectedto an adjacent lead (e.g., second lead 23 b), of the plurality of leads.The electrical connections may be implemented using wires 21, such as agiven wire 21 a, bonded to the given die 20 a deposited on a die surface27 of the first lead 23 a, the given wire 21 a connecting to a diesurface 27 a of a second lead 23 b. Similarly, the plurality of dies 20are deposited on respective leads 23 and are electrically connected toadjacent leads 23 using wire bonds. Portions of mold encapsulation 22are shown in FIG. 2A, though it will be understood that the moldencapsulation 22 covers the lead frame and associated components, asseen from the cross-sectional view shown in FIG. 2B. In an embodiment,the mold encapsulation 22 may be partially or fully opaque and may be ofa given color (e.g., black, grey, etc) such that the lead frame andassociated components may not be visible from a top view. However, itwill be understood that in the top view, as shown in FIG. 2A, the moldencapsulation 22 is shown as transparent for illustrative purposes, suchthat the lead frame and associated components are visible in FIG. 2ALeads 23 a and 23 b, die 20 a, and wire 20 a are referenced herein forexemplary purposes; however, one of ordinary skill in the art wouldunderstand that the same description generally applies for each of theplurality of leads 23, dies 20, and wires 21.

FIG. 2B shows a cross-sectional view of the package assembly 200 of FIG.2A, after step 13 of the process 100 of FIG. 1 . As shown in FIG. 2B,the plurality of leads 23 (e.g., first lead 23 a and second lead 23 b)are provided as part of a lead frame 25. The plurality of dies 20 aredeposited onto the leads 23 (e.g., 23 a and 23 b) and a given die 20 ais deposited on a first lead (e.g., 23 a), of the plurality of leads 23,may be electrically connected to a second lead (e.g., 23 b), of theplurality of leads using electrical connections using wires (e.g., wire21), as disclosed herein. Similarly, a plurality of dies 20 (e.g., die20 a) are deposited on respective leads 23 (e.g., 23 a) and areelectrically connected to adjacent leads (e.g., 23 b) using wires 21. Asshown, mold encapsulation 22, encapsulates the dies 20, plurality ofleads 23 and may be provided between the space between adjacent leads(e.g., between lead 23 a and lead 23 b). Further, the mold encapsulation22 also encapsulates other components such as wires 21 (e.g., wire 21a).

FIG. 2C shows a bottom view of the package assembly 200 of FIGS. 2A and2B, after step 13 of the process 100 of FIG. 1 . As shown in FIG. 2C, aplurality of leads 23 (e.g., leads 23 a and 23 b) may be arranged in anarray configuration. FIG. 2C shows the plating surface 27 b (e.g.,bottom surface) of leads 23 a and 23 b which may be adjacent to eachother in an X direction. As further noted herein, leads 23 that areadjacent to each other in a Y direction (e.g., top and bottom in FIG.2C) may be independent from each other during the semiconductor packagefabrication, as disclosed herein.

At step 14 of the process 100 of FIG. 1 , a bottom surface of theplurality of leads 23 of the lead frame may be plated with a firstelectrical plating 30. The plating surface 27 b of the plurality ofleads 23 may be the surface of the plurality of leads 23 that isopposite from the surface of the plurality of leads 23 that is bonded tothe wires 21 deposited at step 11. Notably, the plating surface 27 b ofthe plurality of leads 23 is the surface of the leads that is notcovered by the molding material.

A first electrical plating 30 may be applied by an electroplatingprocess, at step 14 of the process 100 of FIG. 1 , as shown in FIG. 3 .The first electrical plating 30 may include one or more layers of ametal, such as tin or a tin alloy, plated on the plating surface 27 b ofthe leads 23 and may protect the plating surface 27 b of the leads 23from oxidation and may also provide a wettable surface for soldering.The electroplating process may include depositing a conductive platingmaterial that covers the plating surface (e.g., bottom surface) of theplurality of leads 23 of the lead frame 25 and allows for solder toadhere to the leads 23. A first electrical plating 30 material may bedeposited on the exposed plating surfaces 27 b (e.g., exposed bottomsurfaces) of the leads 23. During the electroplating process of step 14,the lead frame 25 may be dipped in a bath and the lead frame 25 may beelectrically coupled to the cathode of an electrolytic plating device(not shown). The anode of the electrolytic plating device may be coupledto the plating material, which is also dipped in the bath. An electricalcurrent may be applied to the lead frame which causes the platingmaterial to be deposited on the plating surface 27 b (e.g., bottomsurface) of the plurality of leads 23 so that, for example, the platingsurface 27 b of leads 23 a and 23 b are plated with the platingmaterial. At step 14, because only the plating surfaces 27 b of theleads 23 a and 23 b are exposed, only these surfaces are plated by thefirst electrical plating 30. Notably, sidewalls 55 and 56, as furtherdisclosed herein, of the leads 23 a and 23 b, which are not exposed, arenot electrolytically plated. The first electrical plating 30 materialmay be any of a variety of plating materials, such as tin, gold,palladium, or silver.

After step 14 of the process 100 of FIG. 1 , one of two processes may betaken, as shown in FIG. 1 . A first process is described at steps 15,16, 18, and 19 of FIG. 1 and illustrated in FIGS. 4-8 , and a secondprocess is described at steps 17, 18, and 19 of FIG. 1 and illustratedat FIGS. 9-11 .

Referring to the first process, at step 15, top taping and sawsingulation are performed as further described herein.

According to an embodiment, step 15, top taping and saw singulation, ofthe process 100 of FIG. 1 may be taken after applying the firstelectrical plating 30 to the bottom exposed surfaces of the leads 23(e.g., leads 23 a and 23 b of FIG. 3 ) at step 14 of the process 100. Atstep 15, as shown in FIG. 4 , a first connecting film 40 may be appliedto the top major surface 22 a of the mold encapsulation 22. As shown,the connecting film 40 may be applied over a plurality of the leads 23(e.g., leads 23 a and 23 b). The connecting film 40 may be anyapplicable film that attaches to the top major surface 22 a of the moldencapsulation 22. The connecting film 40 may attach to the top majorsurface of the mold encapsulation 22 using any applicable adhesivematerial.

Step 15 of the process 100 of FIG. 1 includes a singulation process. Thesingulation process at step 15 may be implemented using an applicablecutting device and/or technique such as, without limitation, a sawhaving a saw blade, or a laser cutter, a plasma cutter, or a water jetcutter, or any other acceptable cutting device and/or technique as knownto those of skill in the art. The singulation process at step 15 mayinclude making one or more cuts through the first electrical plating 30on the plating surface 27 b (e.g., bottom surface) of the plurality ofleads 23 through the top major surface 22 a of the mold encapsulation 22to create one or more channels 50. The channels 50 may each expose leadsidewalls 55 and 56 on each side of each of the channels. As shown inFIGS. 5A-5C, the lead frame 25 may be singulated into individualsemiconductor die packages 80. The singulation process may includemaking a first series of parallel cuts 51 a along a first direction(e.g., an X direction) cutting through the bottom major surface 22 b(e.g., opposed major surface) of the mold encapsulation 22 opposite ofthe connecting film 40 to a depth up to the connecting film 40 or aportion of the connecting film 40. The first series of parallel cuts 51a may also cut through a portion of the lead frame 25 that is betweenadjacent leads 23 in the vertical direction (e.g., through leadconnectors 28). As applied herein, lead connectors 28 may connect twoadjacent leads and may be part of a lead frame (e.g., lead frame 25)itself or may be formed from one or more other materials. Notably, thisfirst series of parallel cuts 51 a only cut through the area betweenadjacent leads 23 (e.g., leads arranged above or below each other in theY direction if viewing the package assembly 200 from a top view), and donot cut through the leads 23. The singulation process may furtherinclude making a second series of parallel cuts 51 b along a seconddirection (e.g., a Y-direction), the second direction substantiallyperpendicular to the first direction, the second series of parallel cutscutting through the plating surface 27 b (e.g., bottom surface) of eachof the plurality of leads 23, and the electrical plating 30 of each ofthe plurality of leads 23, and the mold encapsulation 22 to a depth upto the connecting film 40 or a portion of the connecting film 40 tocreate a channel 50 exposing a first lead sidewall 55 and a second leadsidewall 56 of each of the plurality of leads 23.

The first and/or second, series of parallel step cuts 51 a and 51 b,between the semiconductor die packages 80 create sidewalls 55 and 56where wettable flanks will be formed. The first and second series ofparallel cuts 51 a and 51 b may be made at a depth not fully through theconnecting film 40 shown in FIG. 4 and FIGS. 5A-C, to allow the packagesto remain as a single assembly for additional handling in subsequentsteps.

FIG. 5A shows a top view of a package assembly 200 at step 15 of process100 of FIG. 1 . As shown in FIG. 5A, a plurality of cuts 51 (e.g., 51 aand 51 b) may be made during a singulation process. The top view shownin FIG. 5A is a top view from below connecting film 40 (not shown inFIG. 5A). The plurality of cuts may include a series of parallel cuts 51a in the X direction (e.g., from a left side to a right side of thepackage assembly 200 shown in FIG. 5A), as well a series of parallelcuts 51 b in the Y direction, as indicated by the axis provided in FIG.5A. The series of parallel cuts in the X direction 51 a may cut throughthe bottom major surface 22 b (e.g., opposed major surface) of the moldencapsulation 22 opposite of the connecting film 40 (shown incorresponding FIG. 5B) to a depth up to the connecting film 40 or aportion of the connecting film 40. Notably, according to the exampleshown in FIGS. 5A-C, the leads 23 in the package assembly 200 areconfigured such that adjacent leads (e.g., 23 a and 23 b) in the Xdirection are connected by wires 21, and adjacent leads 23 in the Ydirection may be connected by lead connectors 28 or may be independentof each other during fabrication of semiconductor die packages, asdisclosed herein. It will be noted that the cuts 51 a and 51 b are shownin the top view of FIG. 5A are from below the connecting film 40 (notshown in FIG. 5A) as the cuts 51 do not extend through the connectingfilm 40 that is above the mold encapsulation 22 shown in FIG. 5A. Thecuts 51 b in the Y direction create channels 50 (as shown in FIG. 5B)that cut through each of the plurality of leads 23 (e.g., leads 23 a and23 b) whereas the cuts 51 a in the X direction may not cut through theplurality of leads 23 but rather separate adjacent leads in the Ydirection from each other by cutting through the mold encapsulation 22and/or lead connectors 28.

FIG. 5B shows a cross-section view of the package assembly 200 of FIG.5A, during step 15 of the process 100 of FIG. 1 . FIG. 5B shows a seriesof parallel cuts 51 b made in the Y direction to create a plurality ofchannels 50. Notably, the series of parallel cuts 51 b in the Ydirection cut through the first electrical plating 30 on the platingsurface 27 b (e.g., bottom surface) of the plurality of leads 23 (e.g.,leads 23 a and 23 b), through the plurality of leads 23, and through themold encapsulation 22. FIG. 5B shows the channels 50 extending partiallyinto the connecting film 40, though it will be understood that,according to an embodiment, the channels 50 may be formed up to, but notthrough a portion of the connecting film 40. As shown in FIG. 5B, atleast a portion of the connecting film 40 is contiguous over the majortop surface 22 a of the mold encapsulation 22 across multiple leads 23.Notably, the connecting film 40 may have properties (e.g., strength,rigidity, elasticity, etc.) that enable the connecting film 40 tomaintain the plurality of semiconductor die packages 80 of the packageassembly 200 that are separated by the channels 50, to remain as part ofa single unit connected by the connecting film 40. For example, theconnecting film 40 may enable the plurality of semiconductor diepackages 80 of the package assembly 200 plus the plurality of channels50 to have a width, in an X direction, that is substantially equal tothe width of the package assembly 200 before the plurality of cuts atstep 15 of process 100 (e.g., the width of the package assembly 200prior to step 15, as shown in FIG. 4 ).

As shown in FIG. 5B, the channels 50 expose lead sidewalls 55 and 56 ofeach of the plurality of leads 23 (e.g., leads 23 a and 23 b). The leadsidewalls 55 and 56 are created during the formation of the channels 50such that the formation of the channels 50 cuts through each of theplurality of leads 23 (e.g., leads 23 a and 23 b) to expose two leadsidewalls 55 and 56 of each of the plurality of leads 23. The leadsidewalls 55 and 56 correspond to the portions of the leads that facethe respective channels 50. Notably, the channels 50 are created betweena first portion 24 a and second portion 24 b of each of the plurality ofleads 23. The first portion 24 a preferably includes a wire 21 (e.g.,wire 21 a) bonded to the die surface 27 a of the first portion 24 a ofthe plurality of leads 23 and the second portion 24 b preferablyincludes a die 21 (e.g., die 20 a). As shown in FIG. 5B, for example,after the plurality of cuts 51 a and 51 b, each semiconductor diepackage 80 of the package assembly 200 includes a second portion 24 b ofa first lead 23 a, including die 20 a, and a first portion 24 a of asecond lead 23 b, including wire 21 a bonded to a die surface 27 a ofthe first portion 24 a of the second lead 23 b.

FIG. 5C shows a bottom view of the package assembly 200 of FIGS. 5A and5B, at step 15 of the process 100 of FIG. 1 . As shown in FIG. 5C, theplurality of cuts 51 include a series of parallel cuts 51 a in the Xdirection (e.g., from a left side to a right side of the packageassembly 200 shown in FIG. 5C), as well a series of parallel cuts 51 bin the Y direction (e.g., from a top to a bottom of the package assembly200 shown in FIG. 5C). The series of parallel cuts in the X directioncut through the bottom major surface 22 b (e.g., opposed major surface)of the mold encapsulation 22 opposite of the connecting film 40 (shownin corresponding FIG. 5B) to a depth up to the connecting film 40 or aportion of the connecting film 40. The cuts 51 b in the Y directioncreate channels 50 (as shown in FIG. 5B) that cut through each of theplurality of leads 23 (e.g., leads 23 a and 23 b) whereas the cuts 51 ain the X direction do not cut through the plurality of leads 23 butrather separate adjacent leads 23 in the Y direction from each other bycutting through the mold encapsulation 22 and/or lead connectors 28. Asdisclosed herein, the first series of parallel cuts 51 a may also cutthrough a portion of the lead frame 25 that is between adjacent leads 23in the vertical direction (e.g., if the lead connectors 28 are part ofthe lead frame 25).

At step 16 of the process 100 of FIG. 1 , as shown in FIG. 6 , aconductive film 60 is applied to the bottom of the semiconductor diepackages 80 of the package assembly 200 that are separated by channels50. The conductive film 60 may be applied while the connecting film 40of FIGS. 4 and 5B is attached to the top major surface 22 a of the moldencapsulation 22 such that the semiconductor die packages 80 of thepackage assembly 200 maintain their position and/or structure while theconductive film 60 is applied. The connecting film 40 of FIGS. 4 and 5Bmay be removed at step 16 of process 100 such that the semiconductor diepackages 80 of the package assembly 200 may be connected to each otherby the conductive film 60. Notably, the conductive film 60 may haveproperties (e.g., strength, rigidity, elasticity, etc.) that enable theconductive film 60 to maintain the plurality semiconductor die packages80 of the package assembly 200 that are separated by the channels 50, toremain as part of a single unit connected by the conductive film 60. Forexample, the conductive film 60 may enable the plurality ofsemiconductor die packages 80 of the package assembly 200 plus theplurality of channels 50 to have a width, in an X direction, that issubstantially equal to the width of the package assembly 200 before theremoval of the connecting film 40 at step 16 of process 100 (e.g., thewidth of the package assembly 200 prior to step 16, as shown in FIG.5B). The conductive film 60 may be made from any applicable materialthat conducts electricity such that an electrical path is maintainedbetween segments of the package assembly 200 separate by channels 50.For example, the conductive film 60 may be made from or may includemetal or metal alloys. It will be noted that although conductive film 60is described herein, the conductive film 60 may also be a connectingfilm.

The conductive film 60 is preferably applied to a bottom of thesemiconductor die packages 80 of the package assembly 200, as shown inFIG. 6 . The conductive film 60 is more preferably applied to one ormore of the bottom major surface 22 b of the mold encapsulation 22and/or the first electrical plating 30 on the plating surface 27 b(e.g., bottom surface) of the plurality of leads 23.

After applying the conductive film 60 to the bottom of the semiconductordie packages 80 of the package assembly 200 and removing the connectingfilm 40 from the top of the semiconductor die packages 80 of the packageassembly 200 at step 16, the lead sidewalls 55 and 56 of the pluralityof leads 23 may be plated at step 18 of the process 100 of FIG. 1 . Asshown in FIG. 7 a second electrical plating 70 may be applied by anelectroplating process, at step 18 of the process 100 of FIG. 1 . Thesecond electrical plating 70 may be one or more layers of a metal suchas tin or a tin alloy that plated on the lead sidewalls and may protectthe lead sidewalls from oxidation and may also provide a wettablesurface for soldering. The electroplating process at step 18 may includedepositing a conductive plating material to cover the exposed surface oflead sidewalls 55 and 56 e.g., through the channels 50). During theelectroplating process of step 18, the semiconductor die packages 80 ofthe package assembly 200, connected by the conductive film 60, may bedipped in a bath and may be electrically coupled to the cathode of anelectrolytic plating device. The anode of the electrolytic platingdevice may be coupled to the plating material, which is also dipped inthe bath. An electrical current may be applied to the semiconductor diepackages 80 of the package assembly 200, connected by the conductivefilm 60, which causes the plating material to be deposited on theexposed surface of the lead sidewalls 55 and 56 of the plurality ofleads so that, for example, the exposed surface of the lead sidewalls ofleads 23 a and 23 b are plated with the plating material (electricalplating 70). At step 18, because only the sidewalls 55 and 56 of theleads 23 a and 23 b are exposed, only these surfaces are plated by thesecond electrical plating 70. Notably, after applying the secondelectrical plating 70 at step 18, at least two surfaces of each portion24 a and 24 b of a lead (e.g., a first portion and second portion 24 aand 24 b of lead 23 b) are covered by electrical plating (e.g., firstelectrical plating 30 on a plating surface and second electrical platingon a sidewall surface).

At step 19 of the process 100 of FIG. 1 , the conductive film 60 isremoved, as shown in FIG. 8 . After removal of the conductive film 60 atstep 19, a plurality of semiconductor die packages 80 corresponding toeach of the plurality of package assembly 200 segments of FIG. 7 remain.Each of the plurality of semiconductor die packages 80 include a firstportion 24 a of a lead 23 (e.g., lead 23 b), a die 20 (e.g., die 20 a)deposited over a second portion 24 b of a lead 23 (e.g., lead 23 a), awire 21 (e.g., wire 21 a) electrically connecting the die 20 (e.g., die20 a) to a first portion 24 a of the lead 23 (e.g., a first portion 24 aof lead 23 b). Additionally, each of the portions 24 a and 24 b of leads23 for each of the plurality of semiconductor die packages 80 includeelectrical plating material on the plating surfaces 27 b (e.g., bottomsurfaces) of the portions of the leads as well as the sidewall surfaces55 and 56 of each of the leads 23.

Referring to the second process, at step 17 bottom taping and sawsingulation are performed as an alternative to steps 15 and 16 ofprocess 100 of FIG. 1 . FIG. 9 shows an example of step 17 which mayinclude applying a conductive film 90 to the bottom surface 202 of thepackage assembly 200 after step 14 of the process 100 of FIG. 1 . Toclarify, as shown in FIG. 1 , step 17 follows step 14 of the process 100of FIG. 1 such that step 17 is performed after the first electricalplating 30 is applied to the plating surface 27 b (e.g., bottom surface)of the leads 23. The conductive film 90 applied at step 17 may beattached to the one or both of the bottom major surface 22 b of the moldencapsulation 22 and/or the first electrical plating 30 on the platingsurface 27 b (e.g., bottom surface) of the plurality of leads 23.

As shown in FIGS. 10 a and 10 b , step 17 includes a singulationprocess, such as a saw singulation process described in relation to step15 of process 100 of FIG. 1 . FIG. 10A shows a cross-section view of thepackage assembly 200 and FIG. 10B shows a top view of the packageassembly 200 at step 17. The singulation process at step 17 may beimplemented using an applicable cutting device and/or technique such asa saw having a saw blade, or a laser cutter, a plasma cutter, or a waterjet cutter, or any other acceptable cutting device and/or technique asknown to those of skill in the art. As further described herein, thesingulation process at step 17 may include making one or more cuts 52(e.g., 52 a and/or 52 b) through the top major surface 22 a of the moldencapsulation 22 through the plurality of leads 23 (e.g., leads 23 a an23 b) to create one or more channels 50. The channels 50 may eachinclude exposed lead sidewalls 55 and 56 on each side of each of thechannels. The package assembly 200 may be singulated into individualsemiconductor die packages 80 connected only by the conductive film 90.The singulation process at step 17 may include making a first series ofparallel cuts 52 a along a first direction (e.g., an X direction)cutting through the top major surface 22 a of the mold encapsulation 22opposite of the conductive film 90 to a depth down to the conductivefilm 90 or a portion of the conductive film 90. Notably, this firstseries of parallel cuts 52 a only cut through lead connectors 28, asshown in FIG. 5A, and the area between adjacent electrically unconnectedleads (e.g., leads arranged above or below each other if viewing thepackage assembly 200 from a top view, as shown in FIG. 10B), and do notcut through the leads 23. The first series of parallel cuts 52 a mayalso cut through a portion of the lead frame 25, such as the leadconnectors 28, that is between adjacent leads 23 in the verticaldirection. The singulation process may further include making a secondseries of parallel cuts 52 b along a second direction (e.g., a Ydirection), the second direction substantially perpendicular to thefirst direction, the second series of parallel cuts 52 b cutting throughthe top major surface 22 a of the mold encapsulation 22 surface, downthrough plurality of leads 23, and through the first electrical plating30 of each of the plurality of leads to a depth up to the conductivefilm 90 or a portion of the conductive film 90 to create channels 50exposing a first lead sidewall 55 and a second lead sidewall 56 of eachof the plurality of leads 23. It will be noted that although conductivefilm 90 is described herein, the conductive film 90 may also be aconnecting film.

The first and/or second series of parallel step cuts 52 a and/or 52 bbetween the semiconductor die packages 80 that form the channels 50result in exposed sidewalls that will form wettable flanks. The firstand second series of parallel cuts 52 a and 52 b may be made at a depththat does not extend fully through the conductive film 90, to allow thesemiconductor die packages 80 to remain as a single assembly foradditional handling in subsequent steps. Notably, the conductive film 90may have properties (e.g., strength, rigidity, elasticity, etc.) thatenable the conductive film 90 to maintain the plurality of semiconductordie packages 80 of the package assembly 200, that are separated by thechannels 50, to remain as part of a single unit connected by theconductive film 90. For example, the conductive film 90 may enable thesemiconductor die packages 80 of the package assembly 200 plus theplurality of channels 50 to have a width, in an X direction, that issubstantially equal to the width of the package assembly 200 before thesingulation at step 17 (e.g., the width of the package assembly 200prior to step 17, as shown in FIG. 3 ). The conductive film 90 may bemade from any applicable material that conducts electricity such that anelectrical path is maintained between segments of the package assembly200 separated by channels 50. For example, the conductive film 90 may bemade from or may include metal or metal alloys.

As described herein, steps 18 and 19 may be performed after theapplication of conductive film 90 and the plurality of cuts 52 a and/or52 b to create channels 50 of step 17. Notably the lead sidewalls 55 and56 of the plurality of leads 23 (e.g., the surfaces facing channels 50)may be plated at step 18 of the process 100 of FIG. 1 . As shown in FIG.11 a second electrical plating 70 may be applied by an electroplatingprocess, at step 18 of the process 100 of FIG. 1 . The second electricalplating 70 may be one or more layers of a metal such as tin or a tinalloy that is plated on the lead sidewalls 55 and 56 and may protect thelead sidewalls 55 and 56 from oxidation and may also provide a wettablesurface for soldering. The electroplating process at step 18 may includedepositing a conductive plating material (not shown) to cover theexposed surface of lead sidewalls (e.g., through the channels 50).During the electroplating process of step 18, the semiconductor diepackage 80 of the package assembly 200, connected by the conductive film90, may be dipped in a bath and may be electrically coupled to thecathode of an electrolytic plating device (not shown). The anode of theelectrolytic plating device may be coupled to the plating material,which is also dipped in the bath. An electrical current may be appliedto the lead frame 25 of the package assembly 200, connected by theconductive film 90, which causes the plating material to be deposited onthe exposed surfaces of the lead sidewalls 55 and 56 of the plurality ofleads so that, for example, the exposed surface of the lead sidewalls 55and 56 leads 23 are plated with the plating material (i.e., resulting inelectrical plating 70). At step 18, because only the surfaces of thelead sidewalls 55 and 56 are exposed, only these surfaces are plated bythe second electrical plating 70. Notably, after applying the secondelectrical plating 70 at step 18, at least two surfaces of each portion24 a and 24 b of a lead 23 (e.g., a first portion 24 a and secondportion 24 b of lead 23 b) are covered by electrical plating (e.g.,first electrical plating 30 on a plating surface 27 b (e.g., bottomsurface) and second electrical plating 70 on a lead sidewalls 55, 56).

At step 19 of the process 100 of FIG. 1 , the conductive film 90 isremoved, as shown in FIG. 8 . As shown, after removal of the conductivefilm 90 at step 19, only the plurality of semiconductor die packages 80,of package assembly 200 of FIG. 11 , remain. Each of the plurality ofsemiconductor die packages 80 include a first portion 24 a of a lead 23(e.g., a second portion of lead 23 b shown in the middle semiconductordie package 80 of FIG. 8 ), a die 20 (e.g., die 20 a) bonded to a secondportion 24 b of the lead 23 a, a wire 21 (e.g., wire 21 a) electricallyconnecting the die 20 (e.g., die 20 a) to the first portion 24 a of alead 23 (e.g., a first portion 24 a of lead 23 b). Additionally, each ofthe portions of leads 23 for each of the plurality of semiconductor diepackages 80 include electrical plating material on the plating surfaces27 b (e.g., electrical plating material 30) of the portions of the leads23 as well as the lead sidewalls 55 and 56 (e.g., electrical platingmaterial 70) of each of the leads 23. The electrical plating material(e.g., 30 and/or 70) may serve to mount a given semiconductor diepackage to a printed circuit board (PCB).

Although a specific number and configuration of leads (e.g., leads 23 aand 23 b) is shown and/or described herein, the techniques of thepresent disclosure are applicable to assembly packages having anyconfiguration of leads and/or dies. Additionally, it is understood byone in the art that the same or similar techniques may be applied toprovide QFN packages with wettable flanks as DFN packages with wettableflanks.

FIGS. 12A and 12B show a DFN package with wettable flanks 250 with afirst electrical plating material 30 on the bottom of two correspondingleads (not shown) as well as a second electrical plating 70 on the leadsidewalls (not shown) of the DFN package 250. The first plating material30 and the second plating material 70 may be plated in accordance withthe process 100 of FIG. 1 , as disclosed herein. Additionally, as shownin FIG. 12A a tie bar area 35 may also be plated (e.g., with secondelectrical plating 70). The tie bar area 35 may assist with, asdisclosed herein, forming an electrical connection for current flowduring electroplating (e.g., during the first electrical plating 30and/or second electrical plating 70 such as, for example, in the absenceof a conductive film 90).

FIGS. 12C and 12D show a QFN package 260 with a first electrical platingmaterial 30 on the bottom of corresponding leads (not shown) as well asa second electrical plating 70 on the lead sidewalls (not shown) of theQFN package 260. The first plating material 30 and the second platingmaterial 70 may be plated in accordance with the process 100 of FIG. 1 ,as disclosed herein.

The process 100 of FIG. 1 , as described herein, provides a multi-stepplating process to form semiconductor die package having wettableflanks. The process 100 provides for separate plating steps for platingdifferent surfaces (e.g., plating surface or sidewalls) of semiconductordie packages. The separate plating steps may allow for a simplifiedplating process and may reduce the complexity of plating multiplesurfaces at the same time. Further, the separate plating steps may allowfor plating different surfaces (e.g., plating surface or sidewalls) withdifferent plating material or different concentration of platingmaterials.

It will be appreciated that the foregoing is presented by way ofillustration only and not by way of any limitation. It is contemplatedthat various alternatives and modifications may be made to the describedembodiments without departing from the spirit and scope of theinvention. Having thus described the present invention in detail, it isto be appreciated and will be apparent to those skilled in the art thatmany physical changes, only a few of which are exemplified in thedetailed description of the invention, could be made without alteringthe inventive concepts and principles embodied therein. It is also to beappreciated that numerous embodiments incorporating only part of thepreferred embodiment are possible which do not alter, with respect tothose parts, the inventive concepts and principles embodied therein. Thepresent embodiment and optional configurations are therefore to beconsidered in all respects as exemplary and/or illustrative and notrestrictive, the scope of the invention being indicated by the appendedclaims rather than by the foregoing description, and all alternateembodiments and changes to this embodiment which come within the meaningand range of equivalency of said claims are therefore to be embracedtherein.

What is claimed is:
 1. A method for fabricating semiconductor packagesfrom a package assembly comprising: providing a lead frame assemblycomprising a plurality of leads adjacently positioned, each leadcomprising a first surface and a second surface; encapsulating portionsof the lead frame assembly in a mold encapsulation such that the secondsurface of each of the plurality of leads remain exposed, the moldencapsulation having a first major surface and a second major surface;plating the second surface of each of the plurality of leads with afirst electrical plating; applying a conductive film across the secondsurface of each of the plurality of leads and the second major surfaceof the mold encapsulation; cutting in a first direction through the moldencapsulation, each of the plurality of leads, and the first electricalplating on the second surface of each of the plurality of leads tocreate a channel in each of the plurality of leads, each of the channelsexposing a first lead sidewall and a second lead sidewall of each of theplurality of leads; and plating, through the channel, the first leadsidewall and the second lead sidewall of each of the plurality of leadswith a second electrical plating.
 2. The method of claim 1, furthercomprising removing the conductive film to separate the package assemblyinto individual semiconductor packages, each semiconductor packageincluding the first lead sidewall of a first lead of one of theplurality of leads and the second lead sidewall of an adjacent lead ofthe plurality of leads.
 3. The method of claim 1, further comprisingproviding an integrated circuit die on the first surface of each of theplurality of leads; and the encapsulating further comprisesencapsulating at least portions of each of the integrated circuit dies.4. The method of claim 3, wherein each integrated circuit die ispositioned on a first portion of each of the plurality of leads andelectrically connected to a second portion of an adjacent lead of theplurality of leads.
 5. The method of claim 4, further comprisingremoving the conductive film to separate the package assembly intoindividual semiconductor packages, each semiconductor package includingthe first portion of one of the plurality of leads and the secondportion of an adjacent lead of the plurality of leads.
 6. The method ofclaim 4, wherein plating the second surface and sidewalls of each of theplurality of leads comprises: dipping the encapsulated lead frameassembly in a solution; electrically coupling a power source to the leadframe assembly and to a plating material in the solution; and applyingcurrent to the lead frame assembly via the power source.
 7. The methodof claim 1, further comprising: cutting along a second direction, thesecond direction substantially perpendicular to the first directionthrough the mold encapsulation.
 8. The method of claim 7, whereincutting along the second direction further comprises cutting through aportion of the lead frame assembly that connects the plurality of leads.9. The method of claim 7, further comprising removing the conductivefilm to separate the package assembly into individual semiconductorpackages, each semiconductor package including the first lead sidewallof a first lead of one of the plurality of leads and the second leadsidewall of an adjacent lead of the plurality of leads.
 10. The methodof claim 1, further comprising applying a connecting film to the firstmajor surface of the mold encapsulation prior to cutting in the firstdirection; and applying the conductive film across the second surface ofeach of the plurality of leads and the second major surface of the moldencapsulation occurs after cutting in the first direction.
 11. Themethod of claim 10, further comprising removing the connecting filmprior to plating the first lead sidewall and the second lead sidewallwith a second electrical plating.
 12. The method of claim 1, furthercomprising: applying a film to the second surface of each of theplurality of leads prior to encapsulating the lead frame assembly in themold encapsulation; and removing the film prior to plating the secondsurface of each of the plurality of leads with the first electricalplating.
 13. A semiconductor package made by the process comprising:providing a lead frame assembly comprising a plurality of leadsadjacently positioned, each lead comprising a first surface and a secondsurface; encapsulating portions of the lead frame assembly in a moldencapsulation such that the second surface of each of the plurality ofleads remain exposed, the mold encapsulation having a first majorsurface and a second major surface; plating the second surface of eachof the plurality of leads with a first electrical plating; applying aconductive film across the second surface of each of the plurality ofleads and the second major surface of the mold encapsulation; cutting ina first direction through the mold encapsulation, each of the pluralityof leads, and the first electrical plating on the second surface of eachof the plurality of leads to create a channel in each of the pluralityof leads, each of the channels exposing a first lead sidewall and asecond lead sidewall of each of the plurality of leads; plating, throughthe channel, the first lead sidewall and the second lead sidewall ofeach of the plurality of leads with a second electrical plating; andremoving the conductive film to separate the package assembly intoindividual semiconductor packages.
 14. The semiconductor package ofclaim 13, wherein each semiconductor package includes the first leadsidewall of a first lead of one of the plurality of leads and the secondlead sidewall of an adjacent lead of the plurality of leads.
 15. Thesemiconductor package of claim 13, further comprising providing anintegrated circuit die on the first surface of each of the plurality ofleads; and the encapsulating further comprises encapsulating at leastportions of each of the integrated circuit dies.
 16. The method of claim15, wherein each integrated circuit die is positioned on a first portionof each of the plurality of leads and electrically connected to a secondportion of an adjacent lead of the plurality of leads.
 17. The method ofclaim 16, wherein plating the second surface and sidewalls of each ofthe plurality of leads comprises: dipping the encapsulated lead frameassembly in a solution; electrically coupling a power source to the leadframe assembly and to a plating material in the solution; and applyingcurrent to the lead frame assembly via the power source.